About: plasma processing apparatus

Premodifier: plasma processing
Head noun: apparatus

Same concepts

Broader concepts

label	provenance	confidence
plasma processing apparatus	isap:352555134	0.551831
method	isap:134443653	0.176595

Narrower concepts

label	provenance	confidence
plasma cvd	isap:263583707	0.731859
semiconductor wafer	isap:335647347	0.567828
plasma processing apparatus	isap:352555134	0.551831
plasma processing method	isap:421373579	0.456402
apparatus	isap:352555140	0.422460
plasma	isap:422695246	0.323985
method	isap:421373599	0.241356