Head noun: euv
| Same concepts |
|---|
| http://dbpedia.org/resource/Extreme_ultraviolet |
Broader concepts
| label | provenance | confidence |
|---|---|---|
| next-generation lithography technology | isap:238449213 | 0.350501 |
| technology | isap:238449212 | 0.269564 |
| factor | isap:211978811 | 0.186005 |
Narrower concepts
| label | provenance | confidence |
|---|---|---|
| electron beam | isap:125394489 | 0.318338 |