About: electron beam

Premodifier: electron
Head noun: beam

Same concepts
http://dbpedia.org/resource/Cathode_ray

Broader concepts

label	provenance	confidence
charged particle beam	isap:165803281	0.859790
method	isap:308756020	0.830857
high energy beam	isap:165803297	0.826965
technique	isap:285542420	0.826358
charge particle beam	isap:165803273	0.809522
charge particle	isap:454899833	0.794058
other energy source	isap:305037807	0.779020
energetic beam	isap:165803331	0.776812
charged-particle beam	isap:165803304	0.770398
energy source	isap:305037783	0.764604
high-energy radiation	isap:287553376	0.755954
energy beam	isap:165803282	0.723242
form of electromagnetic radiation	isap:166207650	0.721004
various method	isap:308756041	0.720101
other technique	isap:285542435	0.718406
radiant energy	isap:310453323	0.718176
particle beam	isap:165803276	0.714333
high energy ionize radiation	isap:310453327	0.708155
radiation sterilization	isap:41256630	0.706270
excimer laser	isap:91357736	0.705563
irradiation method	isap:308756027	0.695055
inspection system	isap:307390354	0.690007
suitable radiation source	isap:305037805	0.688842
radiation curing	isap:311745265	0.686382
type of radiation	isap:167692272	0.686104
known method	isap:308756022	0.680296
suitable method	isap:308756025	0.670292
limited to	isap:516014342	0.666492
suitable means	isap:86275418	0.665634
film deposition	isap:190732852	0.665451
radiation beam	isap:165803291	0.662567
form of high energy	isap:166207657	0.653966
radiation energy	isap:310453324	0.646762
technology	isap:190044532	0.633949
system	isap:307390348	0.627542
appropriate method	isap:308756050	0.626476
charge beam	isap:165803330	0.625968
beam of charge particle	isap:165803313	0.620966
means	isap:86275414	0.618783
process	isap:5076249	0.611449
radiation source	isap:305037788	0.601932
corpuscular radiation	isap:287553389	0.596157
beam of energetic particle	isap:165803326	0.596136
source	isap:305037784	0.595393
thermal energy	isap:310453331	0.581492
actinic radiation	isap:287553375	0.579892
radiant ray	isap:125423617	0.577826
electric field	isap:93607527	0.567231
high energy source	isap:305037797	0.550884
device	isap:307095996	0.539895
heating source	isap:305037796	0.539053
source of radiation	isap:305037812	0.535834
example	isap:9382583	0.535268
exposure tool	isap:167794515	0.528368
high energy radiation	isap:287553379	0.520881
actinic ray	isap:125423615	0.519665
beam	isap:165803280	0.518786
present invention	isap:289762419	0.517749
parameter	isap:288412121	0.513714
ray	isap:125423614	0.503818
other	isap:93340730	0.500955
particle radiation	isap:287553387	0.492663
material	isap:458995441	0.479161
heating	isap:5733836	0.465147
particle	isap:454899834	0.465064
other source	isap:305037813	0.457191
step	isap:167398199	0.452416
electromagnetic radiation	isap:287553380	0.441981
furthermore	isap:419532245	0.437155
energy	isap:310453334	0.431295
nm	isap:516015452	0.430441
welding	isap:7322381	0.417236
lithography	isap:416764273	0.406755
light	isap:90753055	0.403074
wave	isap:168002296	0.398564
radiation	isap:287553374	0.343182
agent	isap:86150542	0.332374
laser	isap:91357756	0.332045
art	isap:125454878	0.325486
euv	isap:125394489	0.318338
irradiation	isap:416637134	0.303470
wave-like radiant energy	isap:310453326	0.290909
form	isap:166207647	0.260632
heat	isap:166362399	0.254652
film	isap:166193460	0.253639
chemical	isap:459082547	0.233115
coating	isap:5619140	0.207906
test sample	isap:304646014	0.164719

Narrower concepts

label	provenance	confidence
gamma ray	isap:251489525	0.627876
beam source	isap:497962735	0.621805
electron microscope	isap:503126315	0.578177
linear accelerator	isap:354734327	0.518172
particle beam	isap:165803296	0.449588
x-ray source	isap:497962714	0.446478
pmma	isap:169711783	0.394090
beam	isap:165803289	0.379966
various intensity	isap:151723702	0.353392
process	isap:72742570	0.304251
eb	isap:332839769	0.287956
lithography	isap:356833866	0.283724
ultraviolet	isap:354768750	0.262050
x-ray	isap:205452574	0.259127
material	isap:382998891	0.247372
radiation	isap:152335972	0.178534
klystron	isap:384271966	0.170738
scanning	isap:379075039	0.151851
means	isap:203346480	0.141052
system	isap:499134260	0.127185
wavelength	isap:506769419	0.126143