Premodifier: inspectionHead noun: system
| Same concepts |
|---|
Broader concepts
| label | provenance | confidence |
|---|---|---|
| application | isap:452497265 | 0.646018 |
| machine | isap:441784089 | 0.548817 |
| metrology tool | isap:490355458 | 0.319468 |
| present invention | isap:420404737 | 0.288307 |
Narrower concepts
| label | provenance | confidence |
|---|---|---|
| electron beam | isap:307390354 | 0.690007 |
| development | isap:142571296 | 0.414654 |
| present invention | isap:137820108 | 0.313961 |
| camera | isap:384977056 | 0.284235 |
| subsidiary | isap:253999924 | 0.139949 |
| wafer | isap:164480707 | 0.107503 |