About: film deposition

Premodifier: film
Head noun: deposition

Same concepts

Broader concepts

label	provenance	confidence
process	isap:219679944	0.759768
application	isap:315548065	0.497318
step	isap:505665284	0.360742

Narrower concepts

label	provenance	confidence
chemical vapor deposition	isap:400695931	0.810026
electron beam	isap:190732852	0.665451