Head noun: filmPostmodifier: form process
| Same concepts |
|---|
Broader concepts
| label | provenance | confidence |
|---|---|---|
| process | isap:5863448 | 0.481764 |
Narrower concepts
| label | provenance | confidence |
|---|---|---|
| sputtering | isap:504160369 | 0.501299 |
| temperature | isap:354541636 | 0.333734 |
| film | isap:177647898 | 0.245782 |