Head noun: microlithography
| Same concepts |
|---|
| http://dbpedia.org/resource/Lithography |
Broader concepts
| label | provenance | confidence |
|---|---|---|
| industrial application | isap:111065026 | 0.640622 |
| precision application | isap:111065028 | 0.521431 |
| technique | isap:263757850 | 0.468861 |
| field | isap:465581003 | 0.452221 |
| application | isap:111065027 | 0.360788 |
| projection objective | isap:262036667 | 0.212140 |
Narrower concepts
| label | provenance | confidence |
|---|---|---|
| system | isap:404782221 | 0.109613 |