Head noun: microlithography
Same concepts |
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http://dbpedia.org/resource/Lithography |
Broader concepts
label | provenance | confidence |
---|---|---|
industrial application | isap:111065026 | 0.640622 |
precision application | isap:111065028 | 0.521431 |
technique | isap:263757850 | 0.468861 |
field | isap:465581003 | 0.452221 |
application | isap:111065027 | 0.360788 |
projection objective | isap:262036667 | 0.212140 |
Narrower concepts
label | provenance | confidence |
---|---|---|
system | isap:404782221 | 0.109613 |