Premodifier: projection
Head noun: objective
| Same concepts |
|---|
Broader concepts
| label | provenance | confidence |
|---|---|---|
| microlithographic projection exposure apparatus | isap:352281650 | 0.647326 |
| projection objective | isap:352220493 | 0.614080 |
| system | isap:136148489 | 0.358424 |
Narrower concepts
| label | provenance | confidence |
|---|---|---|
| projection objective | isap:352220493 | 0.614080 |
| concave mirror | isap:420251695 | 0.544700 |
| microlithography | isap:262036667 | 0.212140 |