About: projection objective

Premodifier: projection
Head noun: objective

Same concepts

Broader concepts

label	provenance	confidence
microlithographic projection exposure apparatus	isap:352281650	0.647326
projection objective	isap:352220493	0.614080
system	isap:136148489	0.358424

Narrower concepts

label	provenance	confidence
projection objective	isap:352220493	0.614080
concave mirror	isap:420251695	0.544700
microlithography	isap:262036667	0.212140