About: cathode sputtering

Premodifier: cathode
Head noun: sputtering

Same concepts

Broader concepts

label	provenance	confidence
vacuum technique	isap:192222533	0.638573
other means	isap:473458168	0.601201
process	isap:220677802	0.434495

Narrower concepts

label	provenance	confidence
magnetron sputtering	isap:399383566	0.477273