About: magnetron sputtering

Premodifier: magnetron
Head noun: sputtering

Same concepts
http://dbpedia.org/resource/Sputter_deposition

Broader concepts

label	provenance	confidence
method	isap:257020026	0.804363
type of deposition process	isap:505149150	0.620953
vacuum deposition	isap:399637518	0.557811
deposition technique	isap:192222524	0.555996
cathode sputtering	isap:399383566	0.477273
coating	isap:218479663	0.436141
technique	isap:192222490	0.414607
sputtering	isap:399383565	0.290611

Narrower concepts

label	provenance	confidence