About: chemical vapor deposition process

Premodifier: chemical vapor deposition
Head noun: process

Same concepts

Broader concepts

label	provenance	confidence
various process	isap:433846980	0.827226
deposition process	isap:433846619	0.814186
suitable process	isap:433846370	0.810431
process	isap:433845484	0.784576
method	isap:267023241	0.445226

Narrower concepts

label	provenance	confidence
deposition	isap:219679948	0.511542
ald	isap:232581002	0.484837
mocvd	isap:229231009	0.433737
process	isap:433846541	0.320778
method	isap:442260721	0.270004