Premodifier: depositHead noun: layer
| Same concepts |
|---|
Broader concepts
| label | provenance | confidence |
|---|---|---|
| material | isap:293789490 | 0.506733 |
Narrower concepts
| label | provenance | confidence |
|---|---|---|
| silicon nitride | isap:36263143 | 0.564947 |
| electrode | isap:13808985 | 0.304125 |
| layer | isap:370507703 | 0.289357 |