Premodifier: depositHead noun: layer
Same concepts |
---|
Broader concepts
label | provenance | confidence |
---|---|---|
material | isap:293789490 | 0.506733 |
Narrower concepts
label | provenance | confidence |
---|---|---|
silicon nitride | isap:36263143 | 0.564947 |
electrode | isap:13808985 | 0.304125 |
layer | isap:370507703 | 0.289357 |