About: exposure dose

Premodifier: exposure
Head noun: dose

Same concepts

Broader concepts

label	provenance	confidence
exposure condition	isap:289607831	0.710225
process condition	isap:289607825	0.512274
lithographic apparatus	isap:289787540	0.376846
parameter	isap:290955810	0.313684

Narrower concepts

label	provenance	confidence