About: lithographic apparatus

Premodifier: lithographic
Head noun: apparatus

Same concepts

Broader concepts

label	provenance	confidence
lithographic apparatus	isap:352555273	0.495183

Narrower concepts

label	provenance	confidence
substrate table	isap:336536967	0.730026
projection system	isap:422341533	0.711037
substrate table wt	isap:98252243	0.594745
lithographic apparatus	isap:352555273	0.495183
illumination setting	isap:318263629	0.459945
mask	isap:285745115	0.405577
exposure dose	isap:289787540	0.376846
reference	isap:351742935	0.337900