Premodifier: exposureHead noun: method
| Same concepts |
|---|
Broader concepts
| label | provenance | confidence |
|---|---|---|
| exposure method | isap:387628581 | 0.549995 |
Narrower concepts
| label | provenance | confidence |
|---|---|---|
| device manufacturing method | isap:387629881 | 0.727252 |
| exposure method | isap:387628581 | 0.549995 |
| exposure apparatus | isap:134443633 | 0.536291 |
| present invention | isap:137300621 | 0.454561 |
| step | isap:309663688 | 0.322556 |