About: exposure apparatus

Premodifier: exposure
Head noun: apparatus

Same concepts

Broader concepts

label	provenance	confidence
lithography apparatus	isap:352555213	0.804049
exposure apparatus	isap:352555059	0.725997
optical member	isap:134667218	0.700467
various apparatus	isap:352555598	0.677159
apparatus	isap:352555076	0.638521
optical instrument	isap:43026796	0.605791
device manufacturing method	isap:134443582	0.602047
exposure method	isap:134443633	0.536291
system	isap:135538858	0.430921
method	isap:134443575	0.385276
invention	isap:353655151	0.340658
present invention	isap:353655123	0.294766
however	isap:24290316	0.240952

Narrower concepts

label	provenance	confidence
exposure apparatus	isap:352555059	0.725997
optical exposure apparatus	isap:352555374	0.706836
projection exposure apparatus	isap:352555236	0.658461
scanning projection exposure apparatus	isap:352555228	0.638125
exposure light source	isap:421518133	0.625671
scanning stepper	isap:317472298	0.616328
optical system	isap:422341538	0.586143
present invention	isap:351502373	0.578287
substrate	isap:353139607	0.448095
illumination optical system	isap:112158055	0.432905
stage	isap:334686179	0.409523
fig 7	isap:262095168	0.390830
apparatus	isap:352555116	0.364151
mask	isap:285745116	0.279209
stepper	isap:317472294	0.273853
method	isap:421373618	0.246304
semiconductor	isap:21882134	0.242113
further	isap:321052332	0.186828