About: projection exposure apparatus

Premodifier: projection exposure
Head noun: apparatus

Same concepts

Broader concepts

label	provenance	confidence
apparatus	isap:352555482	0.687021
exposure apparatus	isap:352555236	0.658461
projection exposure apparatus	isap:352555165	0.642402
optical system	isap:135539011	0.545564

Narrower concepts

label	provenance	confidence
projection exposure apparatus	isap:352555165	0.642402
stepper	isap:317472295	0.491145
fig 1	isap:262095251	0.446759
system	isap:422341571	0.349307
apparatus	isap:352555096	0.249585