About: immersion lithography

Premodifier: immersion
Head noun: lithography

Same concepts
http://dbpedia.org/resource/Immersion_lithography

Broader concepts

label	provenance	confidence
lithography technique	isap:277806345	0.772234
resolution enhancement technique	isap:277806342	0.697195
nm	isap:241756454	0.256096

Narrower concepts

label	provenance	confidence