About: resolution enhancement technique

Premodifier: resolution enhancement
Head noun: technique

Same concepts

Broader concepts

label	provenance	confidence

Narrower concepts

label	provenance	confidence
optical proximity correction	isap:192312184	0.803670
immersion lithography	isap:277806342	0.697195
opc	isap:262914814	0.442290
phase	isap:338660505	0.361201