About: oxygen plasma

Premodifier: oxygen
Head noun: plasma

Same concepts

Broader concepts

label	provenance	confidence
gas plasma	isap:394864817	0.671980
technique	isap:422889912	0.565488
method	isap:388711989	0.456726
removed	isap:441102939	0.365521
photoresist	isap:453273595	0.338867
process	isap:447768059	0.320324
polymer	isap:447122275	0.268359

Narrower concepts

label	provenance	confidence