About: process tool

Premodifier: process
Head noun: tool

Same concepts

Broader concepts

label	provenance	confidence
process tool	isap:169784771	0.771445
datum	isap:92805860	0.139036

Narrower concepts

label	provenance	confidence
process tool	isap:169784771	0.771445
chemical vapor deposition	isap:505480514	0.726976