Premodifier: pvdHead noun: process
| Same concepts | 
|---|
Broader concepts
| label | provenance | confidence | 
|---|---|---|
| method | isap:267023381 | 0.285309 | 
Narrower concepts
| label | provenance | confidence | 
|---|---|---|
| ion plating | isap:433006484 | 0.564032 | 
| evaporation | isap:138116317 | 0.498314 | 
| sputtering | isap:220677776 | 0.382107 | 
| deposition | isap:219680029 | 0.295843 |