Premodifier: pvdHead noun: process
| Same concepts |
|---|
Broader concepts
| label | provenance | confidence |
|---|---|---|
| method | isap:267023381 | 0.285309 |
Narrower concepts
| label | provenance | confidence |
|---|---|---|
| ion plating | isap:433006484 | 0.564032 |
| evaporation | isap:138116317 | 0.498314 |
| sputtering | isap:220677776 | 0.382107 |
| deposition | isap:219680029 | 0.295843 |