Premodifier: silicon oxideHead noun: layer
| Same concepts |
|---|
Broader concepts
| label | provenance | confidence |
|---|---|---|
| insulation layer | isap:370507531 | 0.797465 |
| layer | isap:370507194 | 0.680076 |
| native oxide | isap:368858210 | 0.646332 |
Narrower concepts
| label | provenance | confidence |
|---|---|---|
| thermal oxide layer | isap:370508283 | 0.835212 |
| silicon nitride layer | isap:370507601 | 0.739808 |
| present invention | isap:16604319 | 0.667789 |
| silicon | isap:33838147 | 0.388033 |
| example | isap:39989048 | 0.357000 |
| plasma | isap:123381213 | 0.274702 |
| layer | isap:370507197 | 0.268430 |
| dielectric | isap:475792166 | 0.194526 |
| film | isap:85799703 | 0.134605 |