Premodifier: vacuumHead noun: process
| Same concepts |
|---|
Broader concepts
| label | provenance | confidence |
|---|
Narrower concepts
| label | provenance | confidence |
|---|---|---|
| sputtering | isap:220677780 | 0.636223 |
| cvd | isap:235951302 | 0.495657 |
| process | isap:433846446 | 0.381184 |
| evaporation | isap:138116304 | 0.349564 |
| coating | isap:433917861 | 0.242803 |