Premodifier: vapor deposition pvdHead noun: method
| Same concepts | 
|---|
Broader concepts
| label | provenance | confidence | 
|---|
Narrower concepts
| label | provenance | confidence | 
|---|---|---|
| e-beam evaporation | isap:143245136 | 0.810486 | 
| ion vapor deposition ivd | isap:212955070 | 0.672885 | 
| method | isap:387627998 | 0.609747 | 
| sputtering | isap:257020033 | 0.523717 |