About: atomic layer deposition ald

Premodifier: atomic layer deposition
Head noun: ald

Same concepts

Broader concepts

label	provenance	confidence
deposition process	isap:232580996	0.771809
chemical vapor deposition cvd	isap:279116942	0.765064
method	isap:212965401	0.755813
technique	isap:264005814	0.731299
suitable process	isap:232581001	0.723757
other method	isap:212965403	0.722238
variety of technique	isap:232324940	0.597144
several method	isap:212965408	0.582144
means	isap:467882475	0.563971
suitable method	isap:212965404	0.544181
layer	isap:471023023	0.456905
monolayer	isap:262440045	0.350960

Narrower concepts

label	provenance	confidence