About: chemical vapor deposition pecvd

Premodifier: chemical vapor deposition
Head noun: pecvd

Same concepts

Broader concepts

label	provenance	confidence
deposition process	isap:222274301	0.762033
deposition method	isap:163315213	0.724510
known technique	isap:335511191	0.717659
method	isap:163315211	0.674706

Narrower concepts

label	provenance	confidence