Premodifier: conventional depositionHead noun: process
| Same concepts | 
|---|
Broader concepts
| label | provenance | confidence | 
|---|
Narrower concepts
| label | provenance | confidence | 
|---|---|---|
| chemical vapor deposition cvd | isap:235951239 | 0.869669 | 
| spin-on coating | isap:433917787 | 0.768910 | 
| sputtering | isap:220677783 | 0.525681 | 
| cvd | isap:235951238 | 0.475344 | 
| plating | isap:433006487 | 0.467863 |