Premodifier: depositionHead noun: gas
Same concepts |
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Broader concepts
label | provenance | confidence |
---|---|---|
gas | isap:281611181 | 0.409627 |
Narrower concepts
label | provenance | confidence |
---|---|---|
silane sih4 | isap:125053229 | 0.723743 |
silicon source | isap:405941139 | 0.715791 |
oxygen | isap:403626071 | 0.387504 |
hydrogen | isap:349522645 | 0.336860 |