Premodifier: depositionHead noun: gas
| Same concepts |
|---|
Broader concepts
| label | provenance | confidence |
|---|---|---|
| gas | isap:281611181 | 0.409627 |
Narrower concepts
| label | provenance | confidence |
|---|---|---|
| silane sih4 | isap:125053229 | 0.723743 |
| silicon source | isap:405941139 | 0.715791 |
| oxygen | isap:403626071 | 0.387504 |
| hydrogen | isap:349522645 | 0.336860 |