About: silicon source

Premodifier: silicon
Head noun: source

Same concepts

Broader concepts

label	provenance	confidence
deposition gas	isap:405941139	0.715791

Narrower concepts

label	provenance	confidence
silicon	isap:274723621	0.415078
silane	isap:394041683	0.388380
disilane	isap:485882264	0.376863