About: silane sih4

Premodifier: silane
Head noun: sih4

Same concepts

Broader concepts

label	provenance	confidence
deposition gas	isap:125053229	0.723743
reaction gas	isap:125053227	0.704561
pressure chemical vapor deposition	isap:189412477	0.680900
gas	isap:125053211	0.448686
agent	isap:88217519	0.409548

Narrower concepts

label	provenance	confidence
halosilane	isap:506942611	0.172122