Premodifier: pressure chemical vaporHead noun: deposition
| Same concepts |
|---|
Broader concepts
| label | provenance | confidence |
|---|---|---|
| suitable technique | isap:191924754 | 0.861939 |
| chemical vapor deposition cvd | isap:401125750 | 0.818088 |
| deposition technique | isap:191924728 | 0.803928 |
| many different technique | isap:191924820 | 0.800651 |
| process | isap:219679941 | 0.672507 |
| method | isap:254346667 | 0.600320 |
| conventional technique | isap:191924783 | 0.551119 |
| technique | isap:191924723 | 0.550883 |
| example | isap:219732308 | 0.485265 |
| cvd | isap:401125753 | 0.478706 |
| formed | isap:257268989 | 0.408470 |
Narrower concepts
| label | provenance | confidence |
|---|---|---|
| silane sih4 | isap:189412477 | 0.680900 |