Premodifier: hardHead noun: mask
Same concepts |
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http://dbpedia.org/resource/Hardmask |
Broader concepts
label | provenance | confidence |
---|---|---|
layer | isap:89731559 | 0.539736 |
material | isap:459616702 | 0.478363 |
film | isap:171090773 | 0.343226 |
Narrower concepts
label | provenance | confidence |
---|---|---|
silicon nitride | isap:72698250 | 0.584917 |
silicon dioxide | isap:70340334 | 0.396293 |
silicon | isap:73088976 | 0.381944 |
titanium nitride | isap:72698254 | 0.363490 |
nitride | isap:72698253 | 0.307411 |
oxide | isap:199711359 | 0.259450 |
material | isap:377871523 | 0.138550 |