About: hard mask

Premodifier: hard
Head noun: mask

Same concepts
http://dbpedia.org/resource/Hardmask

Broader concepts

label	provenance	confidence
layer	isap:89731559	0.539736
material	isap:459616702	0.478363
film	isap:171090773	0.343226

Narrower concepts

label	provenance	confidence
silicon nitride	isap:72698250	0.584917
silicon dioxide	isap:70340334	0.396293
silicon	isap:73088976	0.381944
titanium nitride	isap:72698254	0.363490
nitride	isap:72698253	0.307411
oxide	isap:199711359	0.259450
material	isap:377871523	0.138550