Premodifier: known depositionHead noun: method
| Same concepts |
|---|
Broader concepts
| label | provenance | confidence |
|---|
Narrower concepts
| label | provenance | confidence |
|---|---|---|
| physical vapor deposition pvd | isap:212392379 | 0.694927 |
| chemical vapor deposition cvd | isap:210983877 | 0.679646 |
| electrochemical deposition ecd | isap:213709212 | 0.561004 |
| molecular beam epitaxy mbe | isap:209427469 | 0.478225 |
| sputtering | isap:257020039 | 0.469528 |