Premodifier: known depositionHead noun: process
| Same concepts |
|---|
Broader concepts
| label | provenance | confidence |
|---|
Narrower concepts
| label | provenance | confidence |
|---|---|---|
| chemical vapor deposition cvd | isap:235951243 | 0.877350 |
| chemical vapor deposition | isap:219679991 | 0.824224 |
| plasma | isap:447768064 | 0.473980 |