Premodifier: known deposition
Head noun: process
Same concepts |
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Broader concepts
label | provenance | confidence |
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Narrower concepts
label | provenance | confidence |
---|---|---|
chemical vapor deposition cvd | isap:235951243 | 0.877350 |
chemical vapor deposition | isap:219679991 | 0.824224 |
plasma | isap:447768064 | 0.473980 |