Premodifier: maskHead noun: material
| Same concepts |
|---|
Broader concepts
| label | provenance | confidence |
|---|
Narrower concepts
| label | provenance | confidence |
|---|---|---|
| film | isap:455805418 | 0.327899 |
| photoresist | isap:463016193 | 0.317558 |
| nitride | isap:44841766 | 0.297173 |
| sio2 | isap:459109611 | 0.270447 |