| label | provenance | confidence |
|---|
| inorganic material | isap:459109560 | 0.666353 |
| dielectric film | isap:172553048 | 0.655666 |
| suitable insulator | isap:287703202 | 0.515406 |
| various dielectric layer | isap:85368934 | 0.489639 |
| material | isap:459109558 | 0.489098 |
| inorganic insulation material | isap:459109615 | 0.486681 |
| suitable dielectric material | isap:459109566 | 0.476565 |
| suitable material | isap:459109567 | 0.470044 |
| suitable insulative material | isap:459109579 | 0.469434 |
| dielectric material | isap:459109559 | 0.449640 |
| suitable insulator material | isap:459109593 | 0.435433 |
| inorganic oxide | isap:94993560 | 0.435125 |
| porous inorganic oxide | isap:94993569 | 0.427255 |
| protective layer | isap:85368924 | 0.422571 |
| transparent material | isap:459109568 | 0.421414 |
| variety of dielectric material | isap:9201835 | 0.413678 |
| insulator | isap:287703200 | 0.409421 |
| different material | isap:459109597 | 0.404607 |
| low-k material | isap:459109610 | 0.400010 |
| film | isap:172553047 | 0.398111 |
| semiconductor material | isap:459109604 | 0.395064 |
| porous oxide | isap:94993567 | 0.393138 |
| non-magnetic material | isap:459109572 | 0.390882 |
| dielectric mask | isap:179294483 | 0.383274 |
| composite layer | isap:85368944 | 0.375098 |
| lower refractive index material | isap:459109644 | 0.374589 |
| metal oxide | isap:94993557 | 0.372476 |
| insulative material | isap:459109570 | 0.370834 |
| inorganic substrate | isap:285519773 | 0.369990 |
| ceramic material | isap:459109574 | 0.369399 |
| inorganic oxide carrier | isap:7767077 | 0.366695 |
| low dielectric constant | isap:457911558 | 0.364398 |
| protective film | isap:172553049 | 0.362379 |
| other dielectric material | isap:459109575 | 0.362376 |
| variety of oxide | isap:9201834 | 0.353251 |
| amorphous oxide | isap:94993578 | 0.352629 |
| fig 2b | isap:515890662 | 0.347872 |
| suitable dielectric | isap:190162275 | 0.346416 |
| gate dielectric | isap:190162271 | 0.341763 |
| other inorganic material | isap:459109581 | 0.338554 |
| oxide material | isap:459109564 | 0.335910 |
| oxide | isap:94993556 | 0.334811 |
| dielectric layer | isap:85368920 | 0.333293 |
| low refractive index | isap:91352996 | 0.318543 |
| major constituent | isap:419498652 | 0.314177 |
| inorganic particle | isap:456603368 | 0.312534 |
| nonmetal oxide | isap:94993576 | 0.311774 |
| low refractive index material | isap:459109580 | 0.311314 |
| substance | isap:290912647 | 0.303336 |
| other material | isap:459109590 | 0.302203 |
| layer 42 | isap:85368936 | 0.299493 |
| silicon oxide | isap:94993559 | 0.295988 |
| insulation material | isap:459109573 | 0.283669 |
| gate oxide | isap:94993562 | 0.279092 |
| porous material | isap:459109617 | 0.278057 |
| mask material | isap:459109611 | 0.270447 |
| interlayer dielectric | isap:190162272 | 0.267900 |
| oxide of silicon | isap:94993564 | 0.265332 |
| insulator material | isap:459109565 | 0.265226 |
| dielectric | isap:190162269 | 0.262439 |
| shell | isap:91988710 | 0.255363 |
| semiconductor | isap:41727532 | 0.252461 |
| sacrificial layer | isap:85368926 | 0.250960 |
| resin | isap:89195070 | 0.248763 |
| compound | isap:458266220 | 0.248321 |
| packaging industry | isap:456731883 | 0.245349 |
| chemical vapor deposition | isap:188260297 | 0.244630 |
| glass | isap:96168751 | 0.242328 |
| dopant | isap:312170519 | 0.240780 |
| al2 o3 | isap:515901401 | 0.239551 |
| impurity | isap:457764752 | 0.235936 |
| surface | isap:3386709 | 0.229222 |
| silicate | isap:454502233 | 0.227895 |
| layer 5 | isap:85368935 | 0.223693 |
| example | isap:5398061 | 0.221276 |
| support | isap:7851548 | 0.221147 |
| ingredient | isap:190104810 | 0.218838 |
| acidic oxide | isap:94993570 | 0.214688 |
| layer 3 | isap:85368946 | 0.212473 |
| gate insulator | isap:287703206 | 0.211284 |
| nonmagnetic material | isap:459109591 | 0.210405 |
| oxide layer | isap:85368922 | 0.209250 |
| inorganic film | isap:172553056 | 0.208215 |
| various additive | isap:454321687 | 0.205850 |
| layer | isap:85368919 | 0.202037 |
| moreover | isap:458241822 | 0.199243 |
| barrier | isap:3051998 | 0.195022 |
| polymer | isap:5629771 | 0.194236 |
| component | isap:286887143 | 0.193963 |
| siox | isap:179037946 | 0.192857 |
| filler | isap:305326324 | 0.188118 |
| silica | isap:307428612 | 0.187071 |
| factor | isap:306122283 | 0.186007 |
| mineral | isap:5347157 | 0.185355 |
| preferred embodiment | isap:190416781 | 0.184970 |
| method | isap:308237226 | 0.175576 |
| metal | isap:88356999 | 0.172744 |
| respect | isap:2434549 | 0.171206 |
| slurry | isap:308194193 | 0.168857 |
| gate | isap:172478714 | 0.168592 |
| ceramic fiber | isap:87176121 | 0.167314 |
| purpose | isap:3728704 | 0.165498 |
| fig 3a | isap:515890697 | 0.164446 |
| semimetal | isap:286540817 | 0.164266 |
| composition | isap:419426934 | 0.163697 |
| ceramic | isap:5271482 | 0.163152 |
| aluminum | isap:455782363 | 0.162573 |
| materials | isap:288875713 | 0.160173 |
| sio2 | isap:179038092 | 0.158890 |
| combination | isap:416742199 | 0.158741 |
| nitride | isap:5244387 | 0.158460 |
| polyimide | isap:286336740 | 0.157158 |
| zro2 | isap:177970091 | 0.155362 |
| amorphous carbon | isap:300594507 | 0.154317 |
| furthermore | isap:417739140 | 0.152097 |
| particularly | isap:314065212 | 0.147878 |
| particle | isap:456603367 | 0.145361 |
| substrate | isap:285519770 | 0.142221 |
| solid particle | isap:456603369 | 0.140915 |
| structure | isap:287247797 | 0.136731 |
| silicon nitride | isap:5244388 | 0.134845 |
| nm | isap:515901318 | 0.132172 |
| mask | isap:179294482 | 0.128729 |
| carbon | isap:300594506 | 0.122949 |
| alumina | isap:4973096 | 0.119200 |
| interaction | isap:419496093 | 0.119195 |
| however | isap:3373446 | 0.118818 |
| coating | isap:5585821 | 0.115003 |
| particular | isap:189342214 | 0.111474 |
| formed | isap:301432587 | 0.110932 |
| art | isap:127438756 | 0.108172 |
| plastic | isap:10301446 | 0.106502 |
| first | isap:87220824 | 0.102255 |
| silicon | isap:6675304 | 0.100927 |
| further | isap:11746776 | 0.097170 |
| fluorine | isap:456509880 | 0.096623 |
| case | isap:172870486 | 0.092666 |
| addition | isap:454317756 | 0.091867 |
| sputtering | isap:189040145 | 0.087523 |
| result | isap:311471979 | 0.080249 |
| embodiment | isap:190416782 | 0.067815 |
| al | isap:515899965 | 0.053622 |
