About: si3 n4

Premodifier: si3
Head noun: n4

Same concepts

Broader concepts

label	provenance	confidence
suitable material	isap:140698623	0.684199
inorganic material	isap:140698629	0.681531
dielectric material	isap:140698622	0.678141
nitride film	isap:332961553	0.661991
material	isap:140698620	0.633791
other inorganic material	isap:140698627	0.612529
silicon nitride	isap:29663730	0.546483
film	isap:332961551	0.503651
oxide	isap:465403005	0.498336
protective film	isap:332961552	0.482286
layer	isap:464765337	0.455536
conventional dielectric	isap:265227192	0.418366
dielectric	isap:265227191	0.397222
sic	isap:186892898	0.391247
combination	isap:97436621	0.376179
coating	isap:30843422	0.267368
sio2	isap:332675696	0.263951
glass	isap:465401976	0.254322
metal	isap:464649597	0.223326
apparatus	isap:98135578	0.195480

Narrower concepts

label	provenance	confidence
article	isap:56445945	0.219397