Premodifier: sacrificial
Head noun: layer
| Same concepts |
|---|
Broader concepts
| label | provenance | confidence |
|---|---|---|
| layer | isap:370507384 | 0.488183 |
| process | isap:222184634 | 0.314476 |
Narrower concepts
| label | provenance | confidence |
|---|---|---|
| silicon dioxide | isap:31864685 | 0.796276 |
| discuss below | isap:364945007 | 0.563880 |
| layer | isap:370507307 | 0.503386 |
| photoresist | isap:414955915 | 0.459689 |
| portion | isap:40110302 | 0.308118 |
| aluminum | isap:358513302 | 0.303227 |
| sio2 | isap:85368926 | 0.250960 |
| film | isap:85799809 | 0.175599 |