Premodifier: processHead noun: step
| Same concepts |
|---|
Broader concepts
| label | provenance | confidence |
|---|---|---|
| process step | isap:167755770 | 0.770281 |
| present invention | isap:290099128 | 0.670937 |
| process | isap:5908211 | 0.604300 |
| flow chart | isap:86289868 | 0.576443 |
| compound | isap:457993465 | 0.553161 |
| material | isap:454937379 | 0.502627 |
| function | isap:460209205 | 0.460248 |
| application | isap:417863997 | 0.447368 |
| invention | isap:290099115 | 0.265138 |
| example | isap:4420050 | 0.153641 |
Narrower concepts
| label | provenance | confidence |
|---|---|---|
| process step | isap:167755770 | 0.770281 |
| deposition | isap:505665279 | 0.757676 |
| ion implantation | isap:408422520 | 0.593817 |
| etching | isap:76529240 | 0.528965 |
| oxidation | isap:152060255 | 0.509509 |
| step | isap:167755715 | 0.498111 |
| distillation | isap:408116809 | 0.465792 |
| sputtering | isap:504942422 | 0.441146 |
| cmp | isap:249999908 | 0.425501 |
| number | isap:488798736 | 0.396962 |
| water | isap:196011834 | 0.393009 |
| annealing | isap:148692851 | 0.378234 |
| buffer | isap:500537147 | 0.372275 |
| lithography | isap:355623549 | 0.318075 |
| energy | isap:496149841 | 0.311877 |
| formation | isap:151247256 | 0.298141 |
| example | isap:72574609 | 0.281305 |
| vacuum | isap:490444561 | 0.277279 |
| understanding | isap:146337709 | 0.270219 |
| crystallization | isap:333254670 | 0.246390 |
| etch | isap:166331402 | 0.208275 |