Premodifier: processHead noun: step
Same concepts |
---|
Broader concepts
label | provenance | confidence |
---|---|---|
process step | isap:167755770 | 0.770281 |
present invention | isap:290099128 | 0.670937 |
process | isap:5908211 | 0.604300 |
flow chart | isap:86289868 | 0.576443 |
compound | isap:457993465 | 0.553161 |
material | isap:454937379 | 0.502627 |
function | isap:460209205 | 0.460248 |
application | isap:417863997 | 0.447368 |
invention | isap:290099115 | 0.265138 |
example | isap:4420050 | 0.153641 |
Narrower concepts
label | provenance | confidence |
---|---|---|
process step | isap:167755770 | 0.770281 |
deposition | isap:505665279 | 0.757676 |
ion implantation | isap:408422520 | 0.593817 |
etching | isap:76529240 | 0.528965 |
oxidation | isap:152060255 | 0.509509 |
step | isap:167755715 | 0.498111 |
distillation | isap:408116809 | 0.465792 |
sputtering | isap:504942422 | 0.441146 |
cmp | isap:249999908 | 0.425501 |
number | isap:488798736 | 0.396962 |
water | isap:196011834 | 0.393009 |
annealing | isap:148692851 | 0.378234 |
buffer | isap:500537147 | 0.372275 |
lithography | isap:355623549 | 0.318075 |
energy | isap:496149841 | 0.311877 |
formation | isap:151247256 | 0.298141 |
example | isap:72574609 | 0.281305 |
vacuum | isap:490444561 | 0.277279 |
understanding | isap:146337709 | 0.270219 |
crystallization | isap:333254670 | 0.246390 |
etch | isap:166331402 | 0.208275 |