About: reactive sputtering

Premodifier: reactive
Head noun: sputtering

Same concepts
http://dbpedia.org/resource/Sputter_deposition

Broader concepts

label	provenance	confidence
other technique	isap:192222469	0.749902
deposition technique	isap:192222485	0.728424
deposition process	isap:220677781	0.705421
sputtering	isap:399383567	0.583748
method	isap:257020071	0.566255
technique	isap:192222483	0.499152

Narrower concepts

label	provenance	confidence