WebIsALOD: silicon oxynitride

Premodifier: silicon
Head noun: oxynitride

Same concepts
http://dbpedia.org/resource/Silicon_oxynitride

Broader concepts

label	provenance	confidence
other material	isap:283706126	0.815379
high dielectric constant material	isap:283706136	0.814819
material	isap:283706121	0.811476
dielectric material	isap:283706123	0.705591
suitable material	isap:283706131	0.701765
silicon oxide	isap:476355105	0.682943
various dielectric	isap:399390823	0.670461
insulator material	isap:283706135	0.670020
organic material	isap:283706148	0.662552
insulator	isap:191778319	0.658943
silicon-containing material	isap:283706150	0.635337
other dielectric	isap:399390824	0.621824
inorganic compound	isap:283093936	0.612804
nitride	isap:216945701	0.593510
layer	isap:472999060	0.576919
combination	isap:314860933	0.567668
combination of material	isap:314860934	0.565628
technique for arc	isap:193723941	0.476596
oxide	isap:476355110	0.464672
like	isap:505957335	0.447341
oxynitride	isap:400100483	0.441456
nitrogen	isap:284852138	0.405580
gate	isap:505097082	0.309404
film	isap:505115338	0.240077

Narrower concepts

About: silicon oxynitride