Head noun: oxynitride
| Same concepts |
|---|
Broader concepts
| label | provenance | confidence |
|---|---|---|
| other dielectric material | isap:283706133 | 0.502178 |
| dielectric layer | isap:472999061 | 0.389026 |
| suitable material | isap:283706160 | 0.384869 |
| dielectric material | isap:283706134 | 0.369213 |
| suitable dielectric | isap:399390825 | 0.331925 |
| material | isap:283706124 | 0.317113 |
| dielectric | isap:399390822 | 0.272465 |
| oxide | isap:476355106 | 0.237566 |
| film | isap:505115341 | 0.232486 |
| layer | isap:472999058 | 0.201913 |
| metal | isap:474734456 | 0.102204 |
Narrower concepts
| label | provenance | confidence |
|---|---|---|
| nitride silicon oxynitride | isap:400100485 | 0.643209 |
| silicon nitride | isap:245638299 | 0.548214 |
| metal oxide | isap:257938180 | 0.509723 |
| nitride silicon | isap:244283720 | 0.499945 |
| silicon oxynitride | isap:400100483 | 0.441456 |
| combination | isap:313101563 | 0.278389 |
| aluminum | isap:180049694 | 0.225428 |
| dielectric | isap:399727444 | 0.182076 |
| silicon | isap:244283719 | 0.097279 |