Premodifier: standard depositionHead noun: technique
Same concepts |
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Broader concepts
label | provenance | confidence |
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Narrower concepts
label | provenance | confidence |
---|---|---|
chemical vapor deposition cvd | isap:264148825 | 0.814701 |
evaporation | isap:277326879 | 0.540347 |
sputtering | isap:192222454 | 0.508480 |