About: thin film deposition method

Premodifier: thin film deposition
Head noun: method

Same concepts

Broader concepts

label	provenance	confidence

Narrower concepts

label	provenance	confidence
vapor deposition	isap:254346705	0.820500
evaporation	isap:143245135	0.553148
sputtering	isap:257020031	0.541576
ald	isap:212965410	0.350896