Premodifier: thin filmHead noun: technique
| Same concepts | 
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Broader concepts
| label | provenance | confidence | 
|---|
Narrower concepts
| label | provenance | confidence | 
|---|---|---|
| chemical vapor deposition | isap:191924759 | 0.723616 | 
| evaporation | isap:277326898 | 0.444334 | 
| sputtering | isap:192222464 | 0.441029 |