About: atomic layer deposition

Premodifier: atomic layer
Head noun: deposition

Same concepts
http://dbpedia.org/resource/Atomic_layer_deposition

Broader concepts

label	provenance	confidence
chemical vapor deposition	isap:400695920	0.882624
deposition process	isap:219679955	0.867470
vapor deposition process	isap:219679946	0.812737
method	isap:254346664	0.790953
technique	isap:191924696	0.770283
deposition technique	isap:191924705	0.767947
deposition method	isap:254346703	0.761813
known technique	isap:191924765	0.731770
process	isap:219680002	0.454412
technology	isap:399628048	0.240547

Narrower concepts

label	provenance	confidence
technique	isap:43888655	0.223796