Premodifier: chemical
Head noun: deposition

Same concepts
http://dbpedia.org/resource/Chemical_vapor_deposition

Broader concepts

labelprovenanceconfidence
suitable meansisap:4749311010.710951
techniqueisap:1919248370.593519
methodisap:2543466990.569498
processisap:2196799860.560246
meansisap:4749310970.434148

Narrower concepts

labelprovenanceconfidence
vapor depositionisap:4006959320.772265
chemical vapor depositionisap:4006959560.664318
sputteringisap:3996375250.401010