Premodifier: chemicalHead noun: deposition
Same concepts |
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http://dbpedia.org/resource/Chemical_vapor_deposition |
Broader concepts
label | provenance | confidence |
---|---|---|
suitable means | isap:474931101 | 0.710951 |
technique | isap:191924837 | 0.593519 |
method | isap:254346699 | 0.569498 |
process | isap:219679986 | 0.560246 |
means | isap:474931097 | 0.434148 |
Narrower concepts
label | provenance | confidence |
---|---|---|
vapor deposition | isap:400695932 | 0.772265 |
chemical vapor deposition | isap:400695956 | 0.664318 |
sputtering | isap:399637525 | 0.401010 |