About: contact hole

Premodifier: contact
Head noun: hole

Same concepts

Broader concepts

label	provenance	confidence
contact hole	isap:171784028	0.820795
fine pattern	isap:7521848	0.721025
structure	isap:285759050	0.660087
pattern	isap:7521846	0.652128
opening	isap:2951412	0.611319
feature	isap:5772852	0.610765
semiconductor substrate	isap:285403589	0.543392
portion	isap:2205343	0.542780
recessed portion	isap:2205342	0.514295
gate electrode	isap:291077133	0.490817
element	isap:2711709	0.487224
hole	isap:171783997	0.464397
difference in level	isap:191511368	0.463566
surface	isap:10251062	0.447621
shape	isap:90379731	0.420509
substrate	isap:285403584	0.408153
area	isap:169425755	0.385099
region	isap:307993009	0.370342
however	isap:11939414	0.236269

Narrower concepts

label	provenance	confidence
contact hole	isap:171784028	0.820795
first feature	isap:76657301	0.597337
gate electrode	isap:147267571	0.563946
contact	isap:74006238	0.261821
photoresist	isap:355226222	0.129349
film	isap:174122742	0.058674